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thin-film transistors
High-Mobility Back-End-of-Line Compatible Indium Oxide Thin-Film Transistors for Monolithic 3D Integration
Na Xiao, Ph.D. Student, Electrical and Computer Engineering
May 6, 16:00
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18:00
B2 L5 R5209
advanced semiconductors
thin-film transistors
This dissertation develops strategies for fabricating high-performance, low-temperature processed indium oxide thin-film transistors for monolithic 3D integration, achieving record mobility and stability through optimized annealing, passivation, and channel engineering techniques.
Na Xiao
Ph.D. Student,
Electrical and Computer Engineering
advanced semiconductors
thin-film transistors
Na Xiao's research focuses on developing high-mobility back-end-of-line (BEOL) compatible indium oxide (In2O3) thin-film transistors (TFTs) for monolithic 3D integration (M3DI).
